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Low Temperature Crystallization of Atomic Layer Deposited SrTiO3 Films with Minimal Interfacial Reactions
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박태주 | - |
| dc.date.accessioned | 2024-12-21T21:31:46Z | - |
| dc.date.available | 2024-12-21T21:31:46Z | - |
| dc.date.issued | 2024-01-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/121395 | - |
| dc.title | Low Temperature Crystallization of Atomic Layer Deposited SrTiO3 Films with Minimal Interfacial Reactions | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제31회 한국반도체학술대회 | - |
| dc.citation.conferencePlace | 경주화백컨벤션센터 | - |
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)