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Anti-plasma and Corrosion for Robust-Mechanical Al/Al2O3/Y2O3 Multilayer Substrate
- Authors
- 좌용호
- Issue Date
- 31-Oct-2024
- Place
- 일본
- Conference Name
- The 38th International Japan-Korea Seminar on Ceramics
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Related Researcher
- CHOA, YONG HO
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)