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Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Hun-Hee | - |
| dc.contributor.author | Yun, Min-Sang | - |
| dc.contributor.author | Lee, Hyun-Wook | - |
| dc.contributor.author | Park, Jin-Goo | - |
| dc.date.accessioned | 2025-04-09T00:33:08Z | - |
| dc.date.available | 2025-04-09T00:33:08Z | - |
| dc.date.issued | 2013-01 | - |
| dc.identifier.issn | 1012-0394 | - |
| dc.identifier.issn | 1662-9779 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/123874 | - |
| dc.title | Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study | - |
| dc.type | Conference | - |
| dc.citation.title | Solid State Phenomena | - |
| dc.citation.volume | 195 | - |
| dc.citation.startPage | 128 | - |
| dc.citation.endPage | 131 | - |
| dc.citation.conferencePlace | 스위스 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)