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Monte-Carlo Simulation of Acid Diffusivity Effect on Line Edge Roughness in Resist Pattern
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 손승우 | - |
| dc.date.accessioned | 2021-06-22T15:50:38Z | - |
| dc.date.available | 2021-06-22T15:50:38Z | - |
| dc.date.issued | 2016-04-21 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/12476 | - |
| dc.title | Monte-Carlo Simulation of Acid Diffusivity Effect on Line Edge Roughness in Resist Pattern | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2016 한국물리학회 봄 학술대회 | - |
| dc.citation.conferencePlace | 대전 DCC | - |
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Related Researcher
- Son, Seung-Woo
- ERICA 첨단융합대학 (ERICA 지능정보양자공학전공)