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Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김우희 | - |
| dc.date.accessioned | 2025-09-11T06:30:33Z | - |
| dc.date.available | 2025-09-11T06:30:33Z | - |
| dc.date.issued | 2025-07 | - |
| dc.identifier.issn | 23669608 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/126384 | - |
| dc.format.extent | 10 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | WILEY-V C H VERLAG GMBH | - |
| dc.title | Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching | - |
| dc.type | Article | - |
| dc.publisher.location | 독일 | - |
| dc.identifier.doi | 10.1002/smtd.202402166 | - |
| dc.identifier.bibliographicCitation | SMALL METHODS, pp 1 - 10 | - |
| dc.citation.title | SMALL METHODS | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 10 | - |
| dc.type.docType | 정기학술지(Article(Perspective Article포함)) | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)