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Zr 도핑이 AZO 박막의 물성에 미치는 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전현식 | - |
| dc.contributor.author | 이상혁 | - |
| dc.contributor.author | 박주희 | - |
| dc.contributor.author | 박진석 | - |
| dc.date.accessioned | 2021-06-22T16:25:00Z | - |
| dc.date.available | 2021-06-22T16:25:00Z | - |
| dc.date.issued | 2016-07 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/13193 | - |
| dc.description.abstract | In this study, Zr-Al-Zn-O (ZAZO) thin films were deposited on glass substrates at room temperature via co-sputtering. The effects of Zr doping on the chemical, structural and optical properties of AZO films were investigated using EDAX, X-ray diffraction, and UV/Vis spectrometer. It was observed that the structure of the ZAZO film changed from polycrystalline into amorphous and their optical bandgap energy increased as the power applied to the ZrO 2 target. | - |
| dc.format.extent | 2 | - |
| dc.language | 한국어 | - |
| dc.language.iso | KOR | - |
| dc.publisher | 대한전기학회 | - |
| dc.title | Zr 도핑이 AZO 박막의 물성에 미치는 영향 | - |
| dc.title.alternative | Effects of zirconium-doping on the properties of AZO films | - |
| dc.type | Article | - |
| dc.publisher.location | 대한민국 | - |
| dc.identifier.bibliographicCitation | 2016년도 대한전기학회 하계학술대회논문집, pp 1163 - 1164 | - |
| dc.citation.title | 2016년도 대한전기학회 하계학술대회논문집 | - |
| dc.citation.startPage | 1163 | - |
| dc.citation.endPage | 1164 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | other | - |
| dc.identifier.url | https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE07011766 | - |
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Related Researcher
- PARK, JIN SEOK
- ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)