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구동오차 보상에 의한 정밀 표면형상 측정 기술High Precision Surface Form Profile Measurement Technique by Motion Error Compensation
- Other Titles
- High Precision Surface Form Profile Measurement Technique by Motion Error Compensation
- Issue Date
- May-2016
- Publisher
- 한국정밀공학회
- Keywords
- surface form profile measurement; error separation; multi-probe method; motion error compensation
- Citation
- 한국정밀공학회 2016년도 춘계학술대회 논문집, pp.106 - 107
- Indexed
- OTHER
- Journal Title
- 한국정밀공학회 2016년도 춘계학술대회 논문집
- Start Page
- 106
- End Page
- 107
- Files in This Item
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)