Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chung, Hong Keun | - |
dc.contributor.author | Pyeon, Jung Joon | - |
dc.contributor.author | Baek, In-Hwan | - |
dc.contributor.author | Lee, Ga-Yeon | - |
dc.contributor.author | Lee, Hansol | - |
dc.contributor.author | Won, Sung Ok | - |
dc.contributor.author | Han, Jeong Hwan | - |
dc.contributor.author | Chung, Taek-Mo | - |
dc.contributor.author | Park, Tae Joo | - |
dc.contributor.author | Kim, Seong Keun | - |
dc.date.accessioned | 2021-06-22T09:09:58Z | - |
dc.date.available | 2021-06-22T09:09:58Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2020-01 | - |
dc.identifier.issn | 0734-2101 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/1417 | - |
dc.description.abstract | Although perovskite tin titanate (SnTiO3, STO) has been predicted to have ferroelectricity with a large spontaneous polarization, the implementation of metastable perovskite STO remains a great challenge. In this study, the atomic layer deposition of STO films was attempted using bis(1-dimethylamino-2-methyl-2-propoxy)tin(II) as the Sn source, titanium-tetrakis-isopropoxide as the Ti source, and water as the oxygen source. It was found that during the process, adsorption of both the precursors was enhanced on the heterogeneous reaction surface because of the correlation growth behavior. STO films remained amorphous below 250 degrees C. Furthermore, although the film was crystallized at 270 degrees C, the perovskite phase was not identified. Despite the use of the Sn precursor with Sn2+, Sn ions in all the films transformed into Sn4+. Although the postdeposition annealing process in a forming gas atmosphere was conducted for the perovskite conversion, the STO film transformed into Ti5Sn3, an intermetallic compound, at 500 degrees C. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | American Institute of Physics | - |
dc.title | Investigation of phases and chemical states of tin titanate films grown by atomic layer deposition | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Tae Joo | - |
dc.identifier.doi | 10.1116/1.5134136 | - |
dc.identifier.scopusid | 2-s2.0-85077234877 | - |
dc.identifier.wosid | 000537525500001 | - |
dc.identifier.bibliographicCitation | Journal of Vacuum Science and Technology A, v.38, no.1, pp.1 - 6 | - |
dc.relation.isPartOf | Journal of Vacuum Science and Technology A | - |
dc.citation.title | Journal of Vacuum Science and Technology A | - |
dc.citation.volume | 38 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 6 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | TIO2 THIN-FILMS | - |
dc.identifier.url | https://avs.scitation.org/doi/10.1116/1.5134136 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr
COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.