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멀티프로브 오차분리법을 이용한 정밀 라인프로파일 측정 기술A Precision Line Profile Measurement Technique Using Multi Probe Error Separation Method
- Other Titles
- A Precision Line Profile Measurement Technique Using Multi Probe Error Separation Method
- Issue Date
- Sep-2020
- Publisher
- 한국정밀공학회
- Keywords
- Line-profile measuring system; On-machine measurement; Multi-DOF motion error; Linear form component; Error separation technique; 라인프로파일 측정시스템; 온-머신 측정; 다자유도 구동오차; 선형 형상 성분; 오차분리기술
- Citation
- 한국정밀공학회지, v.37, no.9, pp.643 - 651
- Indexed
- SCOPUS
KCI
- Journal Title
- 한국정밀공학회지
- Volume
- 37
- Number
- 9
- Start Page
- 643
- End Page
- 651
- ISSN
- 1225-9071
- Files in This Item
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)