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Formation of AlN seed layers on (110) Si substrates by plasma-assisted molecular beam epitaxy
- Authors
- 오재응
- Issue Date
- 4-Jul-2013
- Publisher
- The Korean Physical Society
- Citation
- the 16th International Symposium on the Physics of Semiconductors and Applications (ISPSA-2013)
- Conference Name
- the 16th International Symposium on the Physics of Semiconductors and Applications (ISPSA-2013)
- Place
- Ramada Plasa Jeju hotel
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