Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS)
DC Field | Value | Language |
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dc.contributor.author | Yang, Seungkyu | - |
dc.contributor.author | Kim, Hyungsub | - |
dc.contributor.author | Pawar, Rajendra Charandeo | - |
dc.contributor.author | Ahn, Sung-Hoon | - |
dc.contributor.author | Lee, Sunyong Caroline | - |
dc.date.accessioned | 2021-06-22T20:03:03Z | - |
dc.date.available | 2021-06-22T20:03:03Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2015-05 | - |
dc.identifier.issn | 2234-7593 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/18357 | - |
dc.description.abstract | Barium Titanate (BaTiO3, BT) layers were deposited using Nano Particle Deposition System (NPDS). NPDS is a type of Aerosol Deposition Method (ADM), dry deposition approach that simplifies the process of depositing a BaTiO3 layer because it eliminates the need for solvents or binder. In this study, a BaTiO3 dielectric layer was deposited using NPDS, and its dielectric properties and microstructure were characterized. Polarization-electric field (P-E) hysteresis analysis was used to characterize the resulting metalinsulator-metal (MIM) capacitor structure, and the capacitance value and leakage current were measured. The BaTiO3 dielectric layer had a thickness of 5 mu m and a high dielectric constant of 1300 without heat treatment, while maintaining high crystallinity after deposition. A high capacitance value of 228 nF/cm(2) was obtained. This work demonstrated the use of ADM for fabricating a capacitor structure. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS) | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Lee, Sunyong Caroline | - |
dc.identifier.doi | 10.1007/s12541-015-0133-y | - |
dc.identifier.scopusid | 2-s2.0-84929174246 | - |
dc.identifier.wosid | 000354444600021 | - |
dc.identifier.bibliographicCitation | International Journal of Precision Engineering and Manufacturing, v.16, no.5, pp.1029 - 1034 | - |
dc.relation.isPartOf | International Journal of Precision Engineering and Manufacturing | - |
dc.citation.title | International Journal of Precision Engineering and Manufacturing | - |
dc.citation.volume | 16 | - |
dc.citation.number | 5 | - |
dc.citation.startPage | 1029 | - |
dc.citation.endPage | 1034 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001984871 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalWebOfScienceCategory | Engineering, Manufacturing | - |
dc.relation.journalWebOfScienceCategory | Engineering, Mechanical | - |
dc.subject.keywordPlus | BATIO3 THIN-FILMS | - |
dc.subject.keywordPlus | AEROSOL DEPOSITION | - |
dc.subject.keywordPlus | ROOM-TEMPERATURE | - |
dc.subject.keywordPlus | LOW VACUUM | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | CONSTRUCTION | - |
dc.subject.keywordPlus | POWDERS | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | LAYER | - |
dc.subject.keywordAuthor | Aerosol deposition method (ADM) | - |
dc.subject.keywordAuthor | Barium titanate | - |
dc.subject.keywordAuthor | Capacitor | - |
dc.subject.keywordAuthor | Ferroelectric film | - |
dc.subject.keywordAuthor | Nano particle deposition system (NPDS) | - |
dc.identifier.url | https://link.springer.com/article/10.1007%2Fs12541-015-0133-y | - |
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