Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS)
- Authors
- Yang, Seungkyu; Kim, Hyungsub; Pawar, Rajendra Charandeo; Ahn, Sung-Hoon; Lee, Sunyong Caroline
- Issue Date
- May-2015
- Publisher
- 한국정밀공학회
- Keywords
- Aerosol deposition method (ADM); Barium titanate; Capacitor; Ferroelectric film; Nano particle deposition system (NPDS)
- Citation
- International Journal of Precision Engineering and Manufacturing, v.16, no.5, pp.1029 - 1034
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- International Journal of Precision Engineering and Manufacturing
- Volume
- 16
- Number
- 5
- Start Page
- 1029
- End Page
- 1034
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/18357
- DOI
- 10.1007/s12541-015-0133-y
- ISSN
- 2234-7593
- Abstract
- Barium Titanate (BaTiO3, BT) layers were deposited using Nano Particle Deposition System (NPDS). NPDS is a type of Aerosol Deposition Method (ADM), dry deposition approach that simplifies the process of depositing a BaTiO3 layer because it eliminates the need for solvents or binder. In this study, a BaTiO3 dielectric layer was deposited using NPDS, and its dielectric properties and microstructure were characterized. Polarization-electric field (P-E) hysteresis analysis was used to characterize the resulting metalinsulator-metal (MIM) capacitor structure, and the capacitance value and leakage current were measured. The BaTiO3 dielectric layer had a thickness of 5 mu m and a high dielectric constant of 1300 without heat treatment, while maintaining high crystallinity after deposition. A high capacitance value of 228 nF/cm(2) was obtained. This work demonstrated the use of ADM for fabricating a capacitor structure.
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 1. Journal Articles
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