Heat Behavior of Extreme Ultraviolet Pellicle Including Mesh Support

오혜근

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Heat Behavior of Extreme Ultraviolet Pellicle Including Mesh Support

Authors: 오혜근

Issue Date: 25-Feb-2013

Publisher: SPIE

Citation: SPIE Advanced Lithography

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/19059

Conference Name: SPIE Advanced Lithography

Place: San Jose, U.S.A.

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 2. Conference Papers

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