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Effects of pump-induced particle agglomeration during chemical mechanical planarization (CMP)
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Seo, Young gil | - |
| dc.contributor.author | Elaiyaraju, Periyasamy | - |
| dc.contributor.author | Park, Jin-Goo | - |
| dc.date.accessioned | 2021-06-22T21:43:12Z | - |
| dc.date.available | 2021-06-22T21:43:12Z | - |
| dc.date.created | 2021-01-22 | - |
| dc.date.issued | 2014-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/20607 | - |
| dc.description.abstract | In this study, the effects of large particle in chemical mechanical planarization (CMP) slurry were investigated on slurry distribution system, which utilizes a pumping device to circulate CMP slurry. Three different types of pumps (e.g., bellows, diaphragm and magnetically levitated centrifugal pump) were evaluated their performance such as generation of agglomerated particle and defectivity in different of slurries (Ceria slurry, Silica slurry a, Silica slurry b). © 2014 IEEE. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
| dc.title | Effects of pump-induced particle agglomeration during chemical mechanical planarization (CMP) | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Park, Jin-Goo | - |
| dc.identifier.doi | 10.1109/ICPT.2014.7017293 | - |
| dc.identifier.scopusid | 2-s2.0-84925361898 | - |
| dc.identifier.wosid | 000380459700064 | - |
| dc.identifier.bibliographicCitation | ICPT 2014 - Proceedings of International Conference on Planarization/CMP Technology 2014, pp.254 - 258 | - |
| dc.relation.isPartOf | ICPT 2014 - Proceedings of International Conference on Planarization/CMP Technology 2014 | - |
| dc.citation.title | ICPT 2014 - Proceedings of International Conference on Planarization/CMP Technology 2014 | - |
| dc.citation.startPage | 254 | - |
| dc.citation.endPage | 258 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Conference Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.subject.keywordPlus | Agglomeration | - |
| dc.subject.keywordPlus | Cerium oxide | - |
| dc.subject.keywordPlus | Silica | - |
| dc.subject.keywordPlus | Agglomerated particles | - |
| dc.subject.keywordPlus | Ceria slurry | - |
| dc.subject.keywordPlus | CMP slurry | - |
| dc.subject.keywordPlus | Defectivity | - |
| dc.subject.keywordPlus | Distribution systems | - |
| dc.subject.keywordPlus | Large particles | - |
| dc.subject.keywordPlus | Particle agglomerations | - |
| dc.subject.keywordPlus | Silica slurries | - |
| dc.subject.keywordPlus | Pumps | - |
| dc.identifier.url | https://ieeexplore.ieee.org/document/7017293 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)