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Self-purification model for metal-assisted chemical etching of metallurgical silicon

Authors
Li, XiaopengXiao, YanjunYan, ChenglinZhou, KeyaMiclea, Paul-TiberiuMeyer, SylkeSchweizer, Stefan L.Sprafke, AlexanderLee, Jung-HoWehrspohn, Ralf B.
Issue Date
Aug-2014
Publisher
Pergamon Press Ltd.
Keywords
Metal assisted chemical etching; metallurgical silicon; purification effect; transitional metal impurity; etching model
Citation
Electrochimica Acta, v.138, pp.476 - 480
Indexed
SCIE
SCOPUS
Journal Title
Electrochimica Acta
Volume
138
Start Page
476
End Page
480
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/22005
DOI
10.1016/j.electacta.2014.05.048
ISSN
0013-4686
Abstract
Metal-assisted chemical etching (MaCE) of metallurgical-grade silicon (MG-Si) has improved the purity of MG-Si (similar to 99%) to close to solar-grade (similar to 99.9999%) by removing metal impurities during the successful preparation of porous silicon nanowires (SiNWs). A new etching principle is proposed to explain the different levels of chemical reduction between various metal impurities with pore formation during etching. This model provides chemical insights into the relationship between dissolved metal ions and pores evolved during the formation of SiNWs. (C) 2014 Elsevier Ltd. All rights reserved.
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ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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