A real-time scheduling method for the cluster tool with wafer transfer delay
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lim, Si-Yeong | - |
dc.contributor.author | Park, You-Jin | - |
dc.contributor.author | Lee, Hyun | - |
dc.contributor.author | Hur, Sun | - |
dc.date.accessioned | 2021-06-23T00:03:21Z | - |
dc.date.available | 2021-06-23T00:03:21Z | - |
dc.date.created | 2021-01-21 | - |
dc.date.issued | 2014-02 | - |
dc.identifier.issn | 0020-7543 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/23701 | - |
dc.description.abstract | In this study, we propose an effective real-time scheduling method based on the timetabling technique for the cluster tool. Instead of considering the no-wait assumption generally adopted in almost all of the previous literature, we take wafer transfer delay into consideration, which implies that a wafer can stay at the current chamber for a certain, limited time before proceeding to the next chamber. In order to improve the total cycle time, an additional pulling procedure to the timetabling is introduced and applied. Numerical examples show that the proposed method gives effective schedules in real time even for practical-sized problems. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | TAYLOR & FRANCIS LTD | - |
dc.title | A real-time scheduling method for the cluster tool with wafer transfer delay | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Hur, Sun | - |
dc.identifier.doi | 10.1080/00207543.2013.808774 | - |
dc.identifier.scopusid | 2-s2.0-84892928515 | - |
dc.identifier.wosid | 000329900000001 | - |
dc.identifier.bibliographicCitation | INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.52, no.4, pp.934 - 946 | - |
dc.relation.isPartOf | INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH | - |
dc.citation.title | INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH | - |
dc.citation.volume | 52 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 934 | - |
dc.citation.endPage | 946 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Operations Research & Management Science | - |
dc.relation.journalWebOfScienceCategory | Engineering, Industrial | - |
dc.relation.journalWebOfScienceCategory | Engineering, Manufacturing | - |
dc.relation.journalWebOfScienceCategory | Operations Research & Management Science | - |
dc.subject.keywordPlus | WAIT ROBOTIC CELLS | - |
dc.subject.keywordAuthor | semiconductor | - |
dc.subject.keywordAuthor | 450mm wafer manufacturing system | - |
dc.subject.keywordAuthor | real-time scheduling | - |
dc.subject.keywordAuthor | job shop | - |
dc.subject.keywordAuthor | wafer delay | - |
dc.subject.keywordAuthor | timetabling | - |
dc.identifier.url | https://www.tandfonline.com/doi/full/10.1080/00207543.2013.808774 | - |
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