A real-time scheduling method for the cluster tool with wafer transfer delay
- Authors
- Lim, Si-Yeong; Park, You-Jin; Lee, Hyun; Hur, Sun
- Issue Date
- Feb-2014
- Publisher
- TAYLOR & FRANCIS LTD
- Keywords
- semiconductor; 450mm wafer manufacturing system; real-time scheduling; job shop; wafer delay; timetabling
- Citation
- INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.52, no.4, pp.934 - 946
- Indexed
- SCIE
SCOPUS
- Journal Title
- INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH
- Volume
- 52
- Number
- 4
- Start Page
- 934
- End Page
- 946
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/23701
- DOI
- 10.1080/00207543.2013.808774
- ISSN
- 0020-7543
- Abstract
- In this study, we propose an effective real-time scheduling method based on the timetabling technique for the cluster tool. Instead of considering the no-wait assumption generally adopted in almost all of the previous literature, we take wafer transfer delay into consideration, which implies that a wafer can stay at the current chamber for a certain, limited time before proceeding to the next chamber. In order to improve the total cycle time, an additional pulling procedure to the timetabling is introduced and applied. Numerical examples show that the proposed method gives effective schedules in real time even for practical-sized problems.
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF INDUSTRIAL & MANAGEMENT ENGINEERING > 1. Journal Articles
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