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ILD CMP중 Scratch 감소를 위한 CMP 공정기술 개발
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-06-23T00:49:43Z | - |
| dc.date.available | 2021-06-23T00:49:43Z | - |
| dc.date.issued | 2009-06-18 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/24768 | - |
| dc.title | ILD CMP중 Scratch 감소를 위한 CMP 공정기술 개발 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2009년 하계 전기전자재료학회 | - |
| dc.citation.conferencePlace | 창원, 한국 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)