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Embedded Micro / Nano Channels Formation for Three-Dimensional Negative-Tone Photoresist Microstructuring
- Authors
- 정영대
- Issue Date
- 23-Feb-2009
- Place
- San Jose, California
- Conference Name
- SPIE Microlithography
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Related Researcher
- Jung, Young Dae
- ERICA 첨단융합대학 (ERICA 지능정보양자공학전공)