Nanocomposite Mo-Cu-N coatings deposited by reactive magnetron sputtering process with a single alloying target
- Authors
- Jung, Duck Hyeong; Lee, Caroline Sunyong; Moon, Kyoung Il
- Issue Date
- Dec-2013
- Publisher
- ACerS Engineering Ceramics Division
- Keywords
- Multiple targets; Reactive magnetron sputtering; Mechanical properties; Microstructure changes; Powder metallurgy; Mechanical alloying; Nano-composite coating; Nanoindentor; Double target; Surface hardness; Spark plasma sintering; Magnetron sputtering; Ce
- Citation
- Ceramic Engineering and Science Proceedings, v.34, no.3, pp 89 - 96
- Pages
- 8
- Journal Title
- Ceramic Engineering and Science Proceedings
- Volume
- 34
- Number
- 3
- Start Page
- 89
- End Page
- 96
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/25844
- ISSN
- 0196-6219
- Abstract
- In this study, it has been tried to make the single Mo-Cu alloying targets with the Cu content showing the best surface hardness that was determined by investigation on the coatings with the Mo and Cu double target process. The single alloying targets were prepared by powder metallurgy methods such as mechanical alloying and spark plasma sintering. Subsequently, the nanocomposite coatings were prepared by reactive magnetron sputtering process with the single alloying targets in Ar+N2 atmosphere. The microstructure changes of the coatings were investigated by using XRD, SEM and EDS and TEM. The mechanical properties of Mo-Cu-N coatings were evaluated by using nanoindentor. In this study, the nano-composite MoN-Cu coatings prepared using an alloying target was eventually compared with the coatings from the multiple targets.
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Collections - COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 1. Journal Articles
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