Determination of the optical properties of pellicle and their effect on high NA lithohraphy

안일신

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Determination of the optical properties of pellicle and their effect on high NA lithohraphy

Authors: 안일신

Issue Date: 18-Aug-2008

Publisher: 한국진공학회

Citation: The 1st International conference onmicroelectronics and plasma technology

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/26015

Conference Name: The 1st International conference onmicroelectronics and plasma technology

Place: 제주도

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 2. Conference Papers

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