Ellipsometric inspection of the inner surface of pellicle-covered masks

오혜근

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Ellipsometric inspection of the inner surface of pellicle-covered masks

Authors: 오혜근

Issue Date: 25-Apr-2008

Publisher: SPIE

Citation: SPIE Advanced Lithography

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/26425

Conference Name: SPIE Advanced Lithography

Place: San Jose, CA, USA

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 2. Conference Papers

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