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Synthesis of SiGe nanoparticles using GeCl4 & SiCl4 gases on a Si wafer
- Authors
- 이정호
- Issue Date
- 11-Nov-2007
- Place
- University of Tokyo, Japan
- Conference Name
- ACSIN-9
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Related Researcher
- Lee, Jung-Ho
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)