Fabrication of stainless steel mold using electro chemical fabrication (ECF) method for microfluidic Biochip

Abstract

imprinting method has a potential to allow low-cost and high-throughput production of nano patterns for large areas using a single lithographic step. Imprinting method mechanically transfers patterns from a stamp onto a substrate. In imprinting process, the mold is one of the most important factors. The modl for injection molding is generally fabricated by various processes such as EDM, laser method and FeCl3 wet etching. FeCl3 wet etching and electroplating are used to make micro patterns. However, these mehtods have some problems such as poor precision, short mold life time, long process time and high cost. In this study, a stainless steel wafer was used to make imprinting mold to overcome these problems Micro-patterned SUS mold was manufactured by electrochemicalfabrication (ECF). SUS mold is acceptable for injection molding because of its thickness and strength.