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The Effects of Current Type and Density on Dishing Phenomena in CMP Process
- Authors
- 안유민
- Issue Date
- 11-Sep-2006
- Place
- Jeju, Korea
- Conference Name
- The IUMRS International Conference in Asia 2006
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Related Researcher
- Ahn, Yoomin
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)