Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
FEM analysis for the ArF contact hole process using a thermal flow model
- Authors
- 오혜근
- Issue Date
- 30-May-2006
- Publisher
- AVS
- Citation
- 0th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN
- Conference Name
- 0th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN
- Place
- Balitmore, MA 미국
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.