Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Hun-Hee | - |
dc.contributor.author | Yun, Min-Sang | - |
dc.contributor.author | Lee, Hyun-Wook | - |
dc.contributor.author | Park, Jin-Goo | - |
dc.date.accessioned | 2021-06-23T04:05:22Z | - |
dc.date.available | 2021-06-23T04:05:22Z | - |
dc.date.created | 2021-02-18 | - |
dc.date.issued | 2013-01 | - |
dc.identifier.issn | 1012-0394 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/28905 | - |
dc.publisher | Scitec Publications Ltd. | - |
dc.title | Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Jin-Goo | - |
dc.identifier.scopusid | 2-s2.0-84874218374 | - |
dc.identifier.bibliographicCitation | Solid State Phenomena, v.195, pp.128 - 131 | - |
dc.relation.isPartOf | Solid State Phenomena | - |
dc.citation.title | Solid State Phenomena | - |
dc.citation.volume | 195 | - |
dc.citation.startPage | 128 | - |
dc.citation.endPage | 131 | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scopus | - |
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