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Preface-JSS Focus Issue on CMP for Sub-10 nm Technologies
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Philipossian, Ara | - |
| dc.contributor.author | Park, Jin-Goo | - |
| dc.date.accessioned | 2021-06-22T10:02:35Z | - |
| dc.date.available | 2021-06-22T10:02:35Z | - |
| dc.date.issued | 2019-05 | - |
| dc.identifier.issn | 2162-8769 | - |
| dc.identifier.issn | 2162-8777 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/2919 | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Electrochemical Society, Inc. | - |
| dc.title | Preface-JSS Focus Issue on CMP for Sub-10 nm Technologies | - |
| dc.type | Article | - |
| dc.publisher.location | 미국 | - |
| dc.identifier.doi | 10.1149/2.0301905jss | - |
| dc.identifier.scopusid | 2-s2.0-85072016295 | - |
| dc.identifier.wosid | 000468728700001 | - |
| dc.identifier.bibliographicCitation | ECS Journal of Solid State Science and Technology, v.8, no.5, pp Y1 - Y1 | - |
| dc.citation.title | ECS Journal of Solid State Science and Technology | - |
| dc.citation.volume | 8 | - |
| dc.citation.number | 5 | - |
| dc.citation.startPage | Y1 | - |
| dc.citation.endPage | Y1 | - |
| dc.type.docType | Editorial Material | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.identifier.url | https://iopscience.iop.org/article/10.1149/2.0301905jss | - |
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- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)