실시간 분광 ellipsometer를 이용한 a-Si 박막의 결정화 현상연구

안일신

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실시간 분광 ellipsometer를 이용한 a-Si 박막의 결정화 현상연구

Authors: 안일신

Issue Date: 21-Apr-2005

Publisher: 한국물리학회

Citation: 제81회 한국물리학회 정기총회

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/29801

Conference Name: 제81회 한국물리학회 정기총회

Place: 이화여자대학교

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 2. Conference Papers

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