Effects of Pb content and electrode materials on the ferroelectric properties of Pb(Zr0.52Ti0.48)O-3 thin films
- Authors
- Chun, Min Chul; Park, Sanghyun; Park, Solmin; Park, Ga-yeon; Kang, Bo Soo
- Issue Date
- Apr-2019
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- PZT; Pb content; Electrode; Fatigue; Retention
- Citation
- JOURNAL OF ALLOYS AND COMPOUNDS, v.781, pp.1028 - 1032
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF ALLOYS AND COMPOUNDS
- Volume
- 781
- Start Page
- 1028
- End Page
- 1032
- URI
- https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/3023
- DOI
- 10.1016/j.jallcom.2018.12.155
- ISSN
- 0925-8388
- Abstract
- We investigated the effects of Pb content and electrode materials on the ferroelectric properties of metal/ Pb(Zr0.52Ti0.48)O-3/metal thin film capacitors for non-volatile memory device applications. The increase of Pb content resulted in a change from the non-ferroelectric pyrochlore phase to the ferroelectric perovskite phase, and consequently, the enhancement of polarization-voltage hysteresis loops. Non-noble metal/PZT/noble metal asymmetric electrode structures were fabricated by using non-noble metals and a noble metal with different work functions. The asymmetric electrode and the resultant internal field, not only made a shift in the initial hysteresis loops, but also caused continuous degradation of the reliability characteristics of ferroelectric capacitors. (C) 2018 Elsevier B.V. All rights reserved.
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