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C4F8을 이용한 나노미터 두께를 가지는 Hot Embossing 용 마스터의 점착방지막 형성

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dc.contributor.author박진구-
dc.date.accessioned2021-06-23T05:27:03Z-
dc.date.available2021-06-23T05:27:03Z-
dc.date.issued2004-05-14-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/30598-
dc.titleC4F8을 이용한 나노미터 두께를 가지는 Hot Embossing 용 마스터의 점착방지막 형성-
dc.typeConference-
dc.citation.conferenceName2004 한국재료학회 춘계학술대회-
dc.citation.conferencePlace강릉대학교-
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Jin Goo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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