Realtime single wavelength ellipsometer를 이용한 금박막 식각관측 및 Ta2O3 특성 분석

안일신

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Realtime single wavelength ellipsometer를 이용한 금박막 식각관측 및 Ta2O3 특성 분석

Authors: 안일신

Issue Date: 22-Apr-2004

Publisher: 한국물리학회

Citation: 한국물리학회 정기총회

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/30677

Conference Name: 한국물리학회 정기총회

Place: 성균관 대학교

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Appears in Collections: COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 2. Conference Papers

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