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Magnetron Sputering 방법으로 사경사 증착한 Ta2O3 박막의 광특성 연구

Authors
안일신
Issue Date
22-Apr-2004
Publisher
한국물리학회
Citation
한국물리학회 정기총회
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/30678
Conference Name
한국물리학회 정기총회
Place
성균관대학교
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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 2. Conference Papers

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