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A study on the effect of Ceria Particles in CMP Process
- Authors
- 박진구
- Issue Date
- 3-Nov-2000
- Place
- 서울대학교
- Conference Name
- 한국재료학회 추계 학술 대회
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)