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Results 1-5 of 5 (Search time: 0.002 seconds).
The impact of locally deformed multi-stack pellicle and its optimization for extreme ultraviolet lithography
오혜근
Conference
Issue Date
2016
Citation
42nd Micro and Nano Engineering
Publisher
Danube University
Thermal analysis of extreme ultraviolet pellicle with metallic coatings with finite element method
오혜근
Conference
Issue Date
2016
Citation
42nd Micro and Nano Engineering
Publisher
Danube University
Impact of transmission non-uniformity of wrinkled EUV pellicle for N5 patterning with various illuminations
오혜근
Conference
Issue Date
2016
Citation
42nd Micro and Nano Engineering
Publisher
Danube University
Impact of the Non-Ideal Extreme Ultra-Violet (EUV) Mask Stack for 1x nm Patterning and the Effect on the Anamorphic High-NA lithography
오혜근
Conference
Issue Date
2016
Citation
42nd Micro and Nano Engineering
Publisher
Danube University
Layer Dependency on Extreme-Ultraviolet Transmission and Non-Uniform Thickness of Multi-Stack Extreme-Ultraviolet Pellicle Membrane
오혜근
Conference
Issue Date
2016
Citation
42nd Micro and Nano Engineering
Publisher
Danube University
1
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OH, HYE KEUN
5
Date Issued
2016
5
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