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높은 공간 분해능을 위한 미세표면 데이터의 5자유도 정합 방법The 5-d.o.f. Stitching Method of Micro-surface Data for High Spatial Resolution
- Other Titles
- The 5-d.o.f. Stitching Method of Micro-surface Data for High Spatial Resolution
- Issue Date
- May-2012
- Publisher
- 한국정밀공학회
- Keywords
- Microscope; High spatial resolution; Stitching; Surface metrology
- Citation
- 한국정밀공학회 2012년도 춘계학술대회 논문집, v.한국정밀공학회 2012?, no. , pp.847 - 848
- Indexed
- OTHER
- Journal Title
- 한국정밀공학회 2012년도 춘계학술대회 논문집
- Volume
- 한국정밀공학회 2012?
- Start Page
- 847
- End Page
- 848
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)