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서로 다른 횡방향 분해능을 위한 데이터세트들의 공간 동기화 알고리즘Spatial synchronized Algorithm for Lateral Resolution Differences Between Multi-Datasets
- Other Titles
- Spatial synchronized Algorithm for Lateral Resolution Differences Between Multi-Datasets
- Issue Date
- May-2012
- Publisher
- 한국정밀공학회
- Keywords
- Microscope; Overlay; Spatial synchronization; Stitching; Surface metrology
- Citation
- 한국정밀공학회 2012년도 춘계학술대회 논문집, v.한국정밀공학회 2012�, pp 685 - 686
- Pages
- 2
- Indexed
- OTHER
- Journal Title
- 한국정밀공학회 2012년도 춘계학술대회 논문집
- Volume
- 한국정밀공학회 2012�
- Start Page
- 685
- End Page
- 686
- Files in This Item
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Related Researcher
- CHO, NAHM GYOO
- ERICA 공학대학 (DEPARTMENT OF MECHANICAL ENGINEERING)