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TEOS 산화막 위에 기상증착을 통해 성장죈 불화유기박막의 특성평가
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-06-23T07:58:14Z | - |
| dc.date.available | 2021-06-23T07:58:14Z | - |
| dc.date.issued | 1999-11-12 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/33445 | - |
| dc.title | TEOS 산화막 위에 기상증착을 통해 성장죈 불화유기박막의 특성평가 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국마이크로전자 및 패키징학회 추계 기술심포지움 | - |
| dc.citation.conferencePlace | 한양대 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)