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희석된 HF 수용액과 IPA, 계면활성제, 과산화수소를 첨가한 혼합액의 실리콘 산화막 식각속도에 대한연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-06-23T07:58:23Z | - |
| dc.date.available | 2021-06-23T07:58:23Z | - |
| dc.date.issued | 1999-11-05 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/33459 | - |
| dc.title | 희석된 HF 수용액과 IPA, 계면활성제, 과산화수소를 첨가한 혼합액의 실리콘 산화막 식각속도에 대한연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국재료학회 추계 학술발표강연 | - |
| dc.citation.conferencePlace | 인하대학교 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)