기상증착과 PECVD를 이용한 불화유기박막의 증착
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2021-06-23T07:58:24Z | - |
dc.date.available | 2021-06-23T07:58:24Z | - |
dc.date.issued | 1999-11-05 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/33460 | - |
dc.title | 기상증착과 PECVD를 이용한 불화유기박막의 증착 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국재료학회 추계 학술발표강연 | - |
dc.citation.conferencePlace | 인하대학교 | - |
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