Variable angle spectroscopic ellipsometry를 이용한 aluminum위의 불화 유기박막에대한 두께 및 광학 특성결정
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박진구 | - |
dc.date.accessioned | 2021-06-23T08:12:35Z | - |
dc.date.available | 2021-06-23T08:12:35Z | - |
dc.date.issued | 1998-11-01 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34214 | - |
dc.title | Variable angle spectroscopic ellipsometry를 이용한 aluminum위의 불화 유기박막에대한 두께 및 광학 특성결정 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국재료학회 | - |
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