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층간절연막 적용을 위한 Polyimide의 화학기계적 평탄화 공정
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-06-23T08:12:37Z | - |
| dc.date.available | 2021-06-23T08:12:37Z | - |
| dc.date.issued | 1998-11-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34217 | - |
| dc.title | 층간절연막 적용을 위한 Polyimide의 화학기계적 평탄화 공정 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국재료학회 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)