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산성 세정액내에서 오존의 거동 및 실리콘웨이퍼와의 반응성
- Authors
- 박진구
- Issue Date
- 1-May-1998
- Conference Name
- 한국재료학회
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)