초박형 멤브레인 실리콘/금속 이종 접합 기판 제조 방법
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 유봉영[유봉영] | - |
dc.date.accessioned | 2021-06-23T08:40:54Z | - |
dc.date.available | 2021-06-23T08:40:54Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34817 | - |
dc.title | 초박형 멤브레인 실리콘/금속 이종 접합 기판 제조 방법 | - |
dc.title.alternative | abrication of thin membrane silicon/metal substrate | - |
dc.type | Patent | - |
dc.contributor.affiliatedAuthor | 유봉영[유봉영] | - |
dc.type.rims | PAT | - |
dc.type.iprs | 특허 | - |
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