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코어-쉘 구조의 입자를 이용한 TSV(Through-Si-Via) 형성

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dc.contributor.author좌용호[좌용호]-
dc.contributor.author유봉영[유봉영]-
dc.date.accessioned2021-06-23T08:41:16Z-
dc.date.available2021-06-23T08:41:16Z-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34852-
dc.title코어-쉘 구조의 입자를 이용한 TSV(Through-Si-Via) 형성-
dc.title.alternativeFormation of TSV with core-shell type particles-
dc.typePatent-
dc.contributor.affiliatedAuthor좌용호[좌용호]-
dc.contributor.affiliatedAuthor유봉영[유봉영]-
dc.type.rimsPAT-
dc.type.iprs특허-
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 4. Patents

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CHOA, YONG HO
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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