코어-쉘 구조의 입자를 이용한 TSV(Through-Si-Via) 형성
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 좌용호[좌용호] | - |
dc.contributor.author | 유봉영[유봉영] | - |
dc.date.accessioned | 2021-06-23T08:41:16Z | - |
dc.date.available | 2021-06-23T08:41:16Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/34852 | - |
dc.title | 코어-쉘 구조의 입자를 이용한 TSV(Through-Si-Via) 형성 | - |
dc.title.alternative | Formation of TSV with core-shell type particles | - |
dc.type | Patent | - |
dc.contributor.affiliatedAuthor | 좌용호[좌용호] | - |
dc.contributor.affiliatedAuthor | 유봉영[유봉영] | - |
dc.type.rims | PAT | - |
dc.type.iprs | 특허 | - |
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