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Al 표면의 습식/건식 활성화 공정이 In-use stiction방지를 위한 Fluorocarbon 박막증착에 미치는 영향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박진구 | - |
| dc.date.accessioned | 2021-06-23T08:56:10Z | - |
| dc.date.available | 2021-06-23T08:56:10Z | - |
| dc.date.issued | 1998-04-01 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/35145 | - |
| dc.title | Al 표면의 습식/건식 활성화 공정이 In-use stiction방지를 위한 Fluorocarbon 박막증착에 미치는 영향 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 98 대한전기학회 MEMS 학술발표회 논문집 | - |
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)