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진공자외선 매핑 타원해석기

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dc.contributor.author오혜근[오혜근]-
dc.contributor.author안일신[안일신]-
dc.contributor.author신동수[신동수]-
dc.date.accessioned2021-06-23T09:01:08Z-
dc.date.available2021-06-23T09:01:08Z-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/35448-
dc.title진공자외선 매핑 타원해석기-
dc.typePatent-
dc.contributor.affiliatedAuthor오혜근[오혜근]-
dc.contributor.affiliatedAuthor안일신[안일신]-
dc.contributor.affiliatedAuthor신동수[신동수]-
dc.type.rimsPAT-
dc.type.iprs특허-
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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS > 4. Patents
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY > DEPARTMENT OF APPLIED PHYSICS > 4. Patents

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ERICA 첨단융합대학 (ERICA 반도체·디스플레이공학전공)
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