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실리콘 기판 기반 수소 게터Hydrogen getter base on silicon wafer

Alternative Title
Hydrogen getter base on silicon wafer
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좌용호[좌용호]
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https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/35564
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COLLEGE OF ENGINEERING SCIENCES > ETC > 4. Patents

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CHOA, YONG HO
ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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