Effects of interfacial strength and dimension of structures on physical cleaning window
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Tae Gon | - |
dc.contributor.author | Pacco, Antoine | - |
dc.contributor.author | Wostyn, Kurt | - |
dc.contributor.author | Brems, Steven | - |
dc.contributor.author | Xu, Xiumei | - |
dc.contributor.author | Struyf, Herbert | - |
dc.contributor.author | Arstila, Kai | - |
dc.contributor.author | Vandevelde, B. | - |
dc.contributor.author | Park, Jin-Goo | - |
dc.contributor.author | De Gendt, Stefan | - |
dc.contributor.author | Mertens, Paul.W. | - |
dc.contributor.author | Heyns, Marc | - |
dc.date.accessioned | 2021-06-23T09:43:40Z | - |
dc.date.available | 2021-06-23T09:43:40Z | - |
dc.date.issued | 2012-00 | - |
dc.identifier.issn | 1012-0394 | - |
dc.identifier.issn | 1662-9779 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/36187 | - |
dc.description.abstract | Four different types of FINs; amorphous Si (a-Si), annealed a-Si, polycrystalline Si (poly-Si) and crystalline Si (c-Si) were used to investigate the effect of interfacial strength and the length of structures on the physical cleaning window by measuring their collapse forces by atomic force microscope (AFM). A transmission electron microscope (TEM) and a nano-needle with a nano-manipulator in a scanning electron microscope (SEM) were employed in order to explain the different collapse behavior and their forces. Different fracture shapes and collapse forces of FINs could explain the influence of the interfacial strength on the pattern strength. Furthermore, the different lengths of a-Si FINs were prepared and their collapse forces were measured and the shorter length reduced their pattern strength. Strong adhesion at the interface resulted in a wider process window while smaller dimensions made the process window narrower. © (2012) Trans Tech Publications. | - |
dc.format.extent | 4 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | Scitec Publications Ltd. | - |
dc.title | Effects of interfacial strength and dimension of structures on physical cleaning window | - |
dc.type | Article | - |
dc.publisher.location | 스위스 | - |
dc.identifier.doi | 10.4028/www.scientific.net/SSP.187.123 | - |
dc.identifier.scopusid | 2-s2.0-84860125240 | - |
dc.identifier.wosid | 000308047300028 | - |
dc.identifier.bibliographicCitation | Solid State Phenomena, v.187, pp 123 - 126 | - |
dc.citation.title | Solid State Phenomena | - |
dc.citation.volume | 187 | - |
dc.citation.startPage | 123 | - |
dc.citation.endPage | 126 | - |
dc.type.docType | Conference Paper | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | Adhesion | - |
dc.subject.keywordPlus | Atomic force microscopy | - |
dc.subject.keywordPlus | Cleaning | - |
dc.subject.keywordPlus | Fins (heat exchange) | - |
dc.subject.keywordPlus | Forced convection | - |
dc.subject.keywordPlus | Polysilicon | - |
dc.subject.keywordPlus | Scanning electron microscopy | - |
dc.subject.keywordPlus | Transmission electron microscopy | - |
dc.subject.keywordPlus | Amorphous silicon | - |
dc.subject.keywordPlus | Atomic force microscopy | - |
dc.subject.keywordPlus | Cleaning | - |
dc.subject.keywordPlus | Fins (heat exchange) | - |
dc.subject.keywordPlus | Manipulators | - |
dc.subject.keywordPlus | Nanoneedles | - |
dc.subject.keywordPlus | Polycrystalline materials | - |
dc.subject.keywordPlus | Scanning electron microscopy | - |
dc.subject.keywordPlus | Silicon | - |
dc.subject.keywordPlus | Transmission electron microscopy | - |
dc.subject.keywordPlus | AFM | - |
dc.subject.keywordPlus | Amorphous Si | - |
dc.subject.keywordPlus | Atomic force microscope (AFM) | - |
dc.subject.keywordPlus | Cleaning process | - |
dc.subject.keywordPlus | Collapse behavior | - |
dc.subject.keywordPlus | Crystalline Si (c-Si) | - |
dc.subject.keywordPlus | Fracture shape | - |
dc.subject.keywordPlus | Interfacial strength | - |
dc.subject.keywordPlus | Nano manipulator | - |
dc.subject.keywordPlus | Particle removal | - |
dc.subject.keywordPlus | Pattern collapse | - |
dc.subject.keywordPlus | Polycrystalline-Si | - |
dc.subject.keywordPlus | Process window | - |
dc.subject.keywordPlus | Transmission electron microscope | - |
dc.subject.keywordPlus | Physical cleanings | - |
dc.subject.keywordPlus | Amorphous silicon | - |
dc.subject.keywordPlus | Crystal atomic structure | - |
dc.subject.keywordAuthor | Cleaning process window | - |
dc.subject.keywordAuthor | Particle removal | - |
dc.subject.keywordAuthor | Pattern collapse | - |
dc.subject.keywordAuthor | Physical cleaning | - |
dc.identifier.url | https://www.scientific.net/SSP.187.123 | - |
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