Phase Behaviors of AlN Layers Grown on Si(111) Substrate by Metalorganic Chemical Vapor Deposition: A Transmission Electron Microscopy Study

Kim, Y.H.; Ahn, S.J.; Noh, Y.K.; Kim, M.D.; Oh, J.E.

doi:10.1017/S1431927612010033

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Phase Behaviors of AlN Layers Grown on Si(111) Substrate by Metalorganic Chemical Vapor Deposition: A Transmission Electron Microscopy Study

Authors: Kim, Y.H.; Ahn, S.J.; Noh, Y.K.; Kim, M.D.; Oh, J.E.

Issue Date: Jul-2012

Citation: Microscopy and Microanalysis, v.18, no.S2, pp.1636 - 1637

Indexed: SCIE
SCOPUS

Journal Title: Microscopy and Microanalysis

Volume: 18

Number: S2

Start Page: 1636

End Page: 1637

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/36191

DOI: 10.1017/S1431927612010033

ISSN: 1431-9276

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Appears in Collections: COLLEGE OF ENGINEERING SCIENCES > SCHOOL OF ELECTRICAL ENGINEERING > 1. Journal Articles

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